MELT FLATTENING OF BOROPHOSPHATE GLASS FILM,申请号JP19960318045-传众专利搜索

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发明名称	MELT FLATTENING OF BOROPHOSPHATE GLASS FILM
摘要
申请公布号	JPH09219452(A)	申请公布日期	1997.08.19
申请号	JP19960318045	申请日期	1996.11.28
申请人	MATSUSHITA ELECTRON CORP	发明人	TATENARI TOSHITAKA
分类号	H01L21/31;H01L21/316;H01L21/768;(IPC1-7):H01L21/768	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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