发明名称 |
Integrated waveguide having an internal optical grating |
摘要 |
A method for forming an optical grating within a waveguide integrated on a substrate includes the step of depositing on a substrate successive layers of material constituting a waveguide such that the waveguide has a periodically varying width along a portion of its longitudinal axis. The deposition may be accomplished by depositing by selective area epitaxy at least some of the successive layers through a mask having a periodically varying width along at least one edge. The successive layers deposited through the mask may constitute a plurality of quantum well layers separated from each other by barrier layers which collectively form a multiple quantum well stack.
|
申请公布号 |
US5659640(A) |
申请公布日期 |
1997.08.19 |
申请号 |
US19950495281 |
申请日期 |
1995.06.27 |
申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
JOYNER, CHARLES H. |
分类号 |
H01L27/15;G02B6/12;G02B6/124;G02B6/136;(IPC1-7):G02B6/124 |
主分类号 |
H01L27/15 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|