DRYING DEVICE AND DRYING METHOD,申请号JP19960048201-传众专利搜索

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发明名称	DRYING DEVICE AND DRYING METHOD
摘要
申请公布号	JPH09217986(A)	申请公布日期	1997.08.19
申请号	JP19960048201	申请日期	1996.02.09
申请人	SONY DISC TECHNOL:KK	发明人	YUBI HIROSHI
分类号	F26B3/24;F26B11/08;H01L21/304;(IPC1-7):F26B11/08	主分类号	F26B3/24
代理机构		代理人
主权项
地址

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