摘要 |
<p>PROBLEM TO BE SOLVED: To simplify the constitution of electrodes and wiring portions, and enhance reliability for connecting portions by locating the position of one end part at the center of a length in the direction parallel with an electrode gap between the opposite electrodes, and thereby making connections at specified positions. SOLUTION: An electron emitting part forming thin film 4 and opposite element electrodes 5 and 6 are laminated over an insulating substrate 1 in this order. In this case, all of the space between the opposite electrodes 5 and 6 functions as an electron emitting part 3, and a step coverage over the electrodes 5 and 6 is appropriately set up depending on a resistance value between the emitting part 3 and each electrode 5 and 6, each particle size of conductive fine particles of the emitting part 3, and an energizing process condition. On the occasion of forming the paired element electrodes 5 and 6, either electrode 5 of them is so designed that the position of either one of the right and left in the direction parallel with an electrode gap, is located at the center of a length in the direction parallel with the electrode gap, and concurrently the electrodes 5 and 6 are so designed as to be connected in direction with the wiring 15 in the first layer and the wiring 13 in the second layer at each position perpendicularly intersected with the electrode gap respectively.</p> |