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发明名称
WAVELENGTH STABILIZING NARROW BAND EXCIMER LASER SYSTEM
摘要
申请公布号
JPH09219555(A)
申请公布日期
1997.08.19
申请号
JP19960040219
申请日期
1996.02.28
申请人
NEC CORP
发明人
TADA TERUSHI
分类号
H01S3/106;H01S3/03;H01S3/137;H01S3/139;H01S3/225;(IPC1-7):H01S3/137
主分类号
H01S3/106
代理机构
代理人
主权项
地址
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