Holding mechanism, and exposure apparatus using the mechanism

摘要

A holding mechanism comprises a box body (10,20) for providing a space for accommodating an original (E), an opening (22) formed in a side portion of the box body, for inserting the original into the space, and holding means (11a-c,21a-c) for holding the original within the space by a kinematic mount system. An exposure apparatus can use the holding mechanism.