| 发明名称 |
Method for making metal oxide sputtering targets (barrier powder envelope) |
| 摘要 |
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by enveloping the metal oxide powder in at least one layer of a barrier material while the powder is hot-pressed using a graphite die assembly.
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| 申请公布号 |
US5656216(A) |
申请公布日期 |
1997.08.12 |
| 申请号 |
US19940295594 |
申请日期 |
1994.08.25 |
| 申请人 |
SONY CORPORATION;MATERIALS RESEARCH CORPORATION |
发明人 |
LO, CHI-FUNG;TURN, JOHN;STRAUSS, DAVID P. |
| 分类号 |
C04B35/457;C04B35/645;C23C14/34;(IPC1-7):B22F3/15;C04B35/453 |
主分类号 |
C04B35/457 |
| 代理机构 |
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代理人 |
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| 主权项 |
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