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发明名称
PUROOBUKAADOCHETSUKAA
摘要
申请公布号
JP2638556(B2)
申请公布日期
1997.08.06
申请号
JP19950095252
申请日期
1995.04.20
申请人
NIPPON DENKI KK
发明人
KOMATSUZAKI KAZUHIRO
分类号
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R31/26
代理机构
代理人
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