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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH09202974(A)
申请公布日期
1997.08.05
申请号
JP19960029845
申请日期
1996.01.23
申请人
SONY CORP
发明人
HAYASHI HIROSHI;AMANO SHUNJI;MIYAI SEIICHI;SOTOZAKI MINEHIRO;HONJO TEIJI
分类号
C23C16/50;C23C16/27;C23C16/455;H01L21/205;H01L21/285;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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