摘要 |
PROBLEM TO BE SOLVED: To improve productivity in a shortened time for inspection under a high temperature by providing a back light on an infrared heater for irradiating a liquid crystal panel with infrared rays so that the temperature of a liquid crystal panel can be rise upto a desired value in a short time. SOLUTION: An infrared heater 12 emits infrared rays from above (surface side) a liquid crystal panel 4 while a back light 2 having an infrared wavelength area emits infrared rays from below (rear side) the panel 4. As a result, the temperature of the panel 4 can rise to a desired value, for example, 50-90 deg.C efficiently in a shorter time both from the surface and rear while the structure of an inspecting instrument is simplified. A control computer 9 controls the operation of the infrared heater 12 and the back light 2 based on the detection temperature of a temperature sensor provided near the panel 4 to adjust the inspecting temperature thereby making inspection possible under a desired temperature. |