| 摘要 |
PROBLEM TO BE SOLVED: To reliably polish a fine protrusion without damaging the base plate front surface having the fine protrusion, by providing an abrasive head oscillating means for bringing an abrasive tape supplied to the abrasive head in contact with the fine protrusion and oscillating the tape and the abrasive head. SOLUTION: An abrasive head moving means is provided with an X stage for moving an abrasive head 9 in the X direction of a coordinate axis and a Y stage for moving it in the Y direction of the coordinate axis, and the abrasive head 9 holding the abrasive tape 11 is moved in the position of a fine protrusion 10 on the basis of the information obtained by a sensor means. The abrasive head oscillating means brings the abrasive tape 11 supplied to the abrasive head 9 in contact with the fine protrusion 10 by pressing it by an abrasive head compressing part, oscillates the abrasive tapes 11 and the abrasive head 9, and polishes the fine protrusion 10 from above. |
