发明名称 |
Scanning laser beam delivery system |
摘要 |
There is provided a scanning laser beam delivery system for use in pulsed laser deposition of a target evaporant (40) onto a substrate (50). The system includes a laser beam source (10) for generating a pulsed laser beam, a beam transfer assembly (20) optically coupled to laser beam source (10) for directing the generated pulse laser beam along an optical path (15) having a terminal segment (15') which impinges upon target evaporant (40); and, a control mechanism (30) coupled to beam transfer assembly (20). Beam transfer assembly (20) includes a scanning mechanism (22) for reversibly translating terminal segment (15') of optical path (15) along a scan direction substantially normal to the direction along which terminal segment (15') has a directional component. Actuation of scanning mechanism (22) is automatically controlled by control mechanism (30).
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申请公布号 |
US5654975(A) |
申请公布日期 |
1997.08.05 |
申请号 |
US19960625228 |
申请日期 |
1996.04.01 |
申请人 |
NEOCERA, INC. |
发明人 |
GREEN, STEVEN;VENKETESAN, THIRUMALAI;PATEL, KALPESH |
分类号 |
C23C14/28;(IPC1-7):H01S3/10 |
主分类号 |
C23C14/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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