| 摘要 |
PROBLEM TO BE SOLVED: To readily position a face to be inspected in a range having possibility of interference by a simple structure in an optical interference device using a light having a short interference distance by a method wherein a position of the object to be inspected is adjusted such that a visually observed interference fringe pattern becomes a prescribed pattern by inserting a light source section for adjusting the position of the object to be inspected having a long interference distance in an optical system when positioning of the object to be inspected is executed. SOLUTION: When a light source section 31 for adjusting a position of an object to be inspected in an optical system, a light beam having a long interference distance which is a divergence light is emitted on a reference face 4a and an inspection face 5a, then a spherical wave reaches both of the faces 4a, 5a. These two-route divergence lights are reflected by the reference face 4a and inspection face 5a to become a reference light and an inspection light, respectively. They are synthesized by a light dividing face of a beam splitter 3a to be interfered with each other so that an interference fringe is formed on a CCD. The interference fringe is formed of concentric patterns. The number of concentric fringe patterns is reduced by moving the object 5 to be inspected by a short distance in the direction of arrow B, then the movement of the object 5 is stopped when the circular interference fringe patterns is quenched.
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