发明名称 METHOD FOR TRIMMING FILM RESISTOR
摘要 <p>PROBLEM TO BE SOLVED: To prevent the lowering of the accuracy of adjustment for a resistance value by forming a second trimming groove in the direction of an one-side electrode from the end part of a first trimming groove until the resistance value of a film resistor reaches a target resistance value after a predetermined time elapses from the point of time when the formation of first trimming groove is finished. SOLUTION: A first trimming groove T1 in which a film resistor 3 is removed is formed in the direction of traversing electrodes 4, 4 respectively formed in the opposed end parts of the film resistor 3. The heat generated at a first trimming is radiated after a predetermined time elapses from the point of time when the formation of the first trimming groove T1 is finished, namely, while the first trimming of each chip region for one row is finished and returned to the initial chip region for starting a second trimming. Next, a second trimming groove T2 in which the film resistor 3 is removed is formed in the direction of a one-side electrode 4 from the end part of the first trimming groove T1 until the resistance value of the film resistor 3 reaches a target resistance value.</p>
申请公布号 JPH09199313(A) 申请公布日期 1997.07.31
申请号 JP19960005262 申请日期 1996.01.16
申请人 ROHM CO LTD 发明人 KURATA KENJI
分类号 H01C17/242;H01L21/822;H01L27/04;(IPC1-7):H01C17/242 主分类号 H01C17/242
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