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发明名称
GAS PURGE BOX
摘要
申请公布号
JPH09199433(A)
申请公布日期
1997.07.31
申请号
JP19960024673
申请日期
1996.01.18
申请人
KOKUSAI ELECTRIC CO LTD
发明人
ITO TAKESHI;IKEDA KAZUTO
分类号
C23C16/44;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
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地址
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