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发明名称
METHOD AND DEVICE FOR ADJUSTING TEMPERATURE
摘要
申请公布号
JPH09199491(A)
申请公布日期
1997.07.31
申请号
JP19960028482
申请日期
1996.01.23
申请人
TOKYO ELECTRON LTD
发明人
SUGANO SOICHI
分类号
H05B3/00;C23C16/44;C23C16/52;G05D23/19;H01L21/205;H01L21/22;H01L21/31;(IPC1-7):H01L21/31
主分类号
H05B3/00
代理机构
代理人
主权项
地址
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