METHOD OF AND APPARATUS FOR APPLYING COATING LIQUID TO BASE PLATE BY DIE COATER AND APPARATUS FOR SUPPLYING COATING LIQUID TO DIE COATER

摘要

A base plate coating method using a die coater. A base plate is placed on a support surface having a flatness of not more than 2 .mu.m and a plurality of suction holes. The base plate is then sucked onto the support surface via the suction holes and thereby brought into close contact therewith. Consequently, the deformation (for example, torsion and flexure) of the base plate is eliminated. A coating liquid discharged vertically from a die coater is then applied to the base plate as the die coater is moved relatively to the base plate. As a result, a film of coating having a predetermined thickness is formed on the base plate.