发明名称 WATER-SOLUBLE LAPPING FLUID COMPOSITION
摘要 PROBLEM TO BE SOLVED: To obtain a water-soluble lapping fluid compsn. improved in abrasive grain blending stability and flowability by using a specific anionic polymeric compd., a water-soluble thickening agent, a fatty acid salt, and aluminum magnesium silicate. SOLUTION: An anionic polymeric compd. (A) of 1,000 to 200,000 in average mol.wt. selected from among polycarboxylic acid salts, polystyrenesulfonic acid salts, and naphthalenesulfonic acid salt/formation condensates is blended with a water-solubel thickening agent (B), a 6-60C higher fatty acid salt (C), and aluminum magnesium silicate (D), provided that the wt. proportions of the components are such that A:B=100:0 to 1:50, A:C=100:0 to 1:200, and A:D=100:0 to 1:50.
申请公布号 JPH09194824(A) 申请公布日期 1997.07.29
申请号 JP19960021927 申请日期 1996.01.12
申请人 SANYO CHEM IND LTD 发明人 KAWAGUCHI KOJI;NAGAI KUNIO
分类号 B24B37/00;C09K3/14;H01L21/301;H01L21/304 主分类号 B24B37/00
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