| 摘要 |
A transmission line including a dielectric or semi-insulating substrate; a groove in the substrate; a metallization film disposed on the bottom surface of the groove; a dielectric filling the groove and making contact with the metallization film; a wiring conductor film disposed on the dielectric; and a grounding metallization film disposed on the rear surface of the substrate. Excellent confinement of electromagnetic waves is achieved and electromagnetic wave interference between two neighboring lines is extremely small, realizing a high density arrangement of transmission lines and a compact and lightweight microwave/millimeter wave integrated circuit. Higher modes of electromagnetic wave propagation are avoided by controlling the thickness of the dielectric filling the groove while the thickness of the substrate remains arbitrary, thereby improving production yield and reliability.
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