| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a surface conduction type electron emission element which can be stably machined and is excellent in the yield by taking in and discriminating the image information on the surface of a work to detect the position of the work SOLUTION: A laser beam oscillator 1 which is the light source of the laser beam, and a high-speed shutter to turn ON/OFF the laser beam radiate the laser beam in the direction of a work 7 by a half mirror 3, and at the same time, the surface of the work 7 is observed through the half mirror 3. The work is relatively moved in the X, Y direction to the laser beam by a scanning mechanism 6. The image of the surface of the work 7 is taken in by an image take-in device 12. The image is discriminated by an image discriminating device 13. A computer 11 intensively controls the laser beam oscillator 1, a laser beam control mechanism 8, a position control mechanism 9, a position detecting mechanism 10, and the image discriminating device 13. Deviation of the machining pattern of a conductive thin film relative to an application electrode on a substrate of large area can be prevented. |
