| 摘要 |
PROBLEM TO BE SOLVED: To provide a roll-to-roll treatment method which makes the cleaning of only the vacuum chamber requiring maintenance possible, drastically shortens the required time at the time of maintenance and greatly improves the working rate of the apparatus and the apparatus therefor. SOLUTION: A belt-like substrate is moved from a delivery chamber toward a take-up chamber and is passed through the vacuum chambers having treating chambers 430, 450, 470, by which the substrate is treated, in this roll-to-roll treatment method or the apparatus therefor. These treating chambers are constituted attachably and detachably to and from the vacuum chambers and are provided with gate valves capable of generating pressure differences between the plural vacuum chambers in the state of passing the belt-like substrate therethrough. At the time of maintenance, the gate valves are closed and only the vacuum chamber requiring the maintenance is opened to the atm. pressure. The attachable and detachable treating chamber is then exchanged with a spare chamber. The bobbin of the delivery mechanism or take-up mechanism is otherwise exchanged with a fresh one. |
