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发明名称
STEAM SUPPLIER
摘要
申请公布号
EP0504420(B1)
申请公布日期
1997.07.23
申请号
EP19910917070
申请日期
1991.10.05
申请人
FUJITSU LIMITED;SHINKO SEIKI CO., LTD.
发明人
SHINAGAWA, KEISUKE;FUJIMURA, SHUZO;MATOBA, YUUJI;NAKANO, YOSHIMASA;TAKEUCHI, TATSUYA;MIYANAGA, TAKESHI
分类号
C23C16/448;H01L21/00;(IPC1-7):G03F7/42;H01L21/02
主分类号
C23C16/448
代理机构
代理人
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地址
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