Charged particle beam slit assembly

摘要

The slit assembly includes two cylinders spaced apart from each other. Opposing surfaces of the two cylinders adjacent to the beam path define a slit for passing the charged particle beam. The cylinders have two central axes. The slit assembly further includes a drive system for rotating the cylinders about central axes. The slit assembly may further include a cooling system for controlling the temperatures of the cylinders. The slit assembly may include a system for adjusting the width of the slit.