发明名称 Ion energy analyzer and electrically controlled geometric filter for same
摘要 An ion energy analyzer (100) having a micro-channel plate (104) where the geometric filtering characteristics of the micro-channel plate (104) are electrically controlled. The ion energy analyzer contains a metallic collector (116), a control grid (108) and a micro-channel plate (104), all formed into a cylindrical stack where the collector (116), control grid (108) and micro-channel plate (104) are separated by ceramic insulating washers. A control element is formed within each aperture (124) of the micro-channel plate (104) for controlling a critical angle of each aperture (124). A voltage is applied to the control element such that an electric field is generated within each micro-channel (124). By varying the magnitude of the electric field, the critical angle of the micro-channel plate (104) can be electrically controlled, and as such, certain ion trajectories can be selected for entry into the ion energy analyzer (100). <IMAGE>
申请公布号 EP0734044(A3) 申请公布日期 1997.07.23
申请号 EP19960103793 申请日期 1996.03.11
申请人 APPLIED MATERIALS, INC. 发明人 LOEWENHARDT, PETER;YIN, GERALD ZHEYAO
分类号 H05H1/00;H01J37/05;H01L21/302;H01L21/3065 主分类号 H05H1/00
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