| 摘要 |
PROBLEM TO BE SOLVED: To enlarge a usable temperature range of a member by a method wherein a laminate of a green sheet on which a specific sized window part is formed, and a thin-wall green sheet wherein fine through holes are formed by a specific hole diameter at specific intervals, is integrated by burning. SOLUTION: A thin-wall ceramic board 7 is prepared by forming a plurality of fine through holes 1 on a first green sheet so that the minimum value of a hole diameter after burning becomes 150μm or under, and the minimum value of a hole interval becomes 150μm or under. A ceramic substrate 9 is prepared by forming at least one window part 3 on a second green sheet so that a maximum value w of a width in a shorter direction of the window part 3 and a fine through hole interval (d) satisfy w(mm)>=10/d(μm). Then, the first green sheet is laminated so that a part of a plurality of fine through holes conforms to a part of the window part 3 to form an integral laminate. They are burnt thereafter to make an integral sintered product. Thereby, a heat resistant abrasion resistant and low thermally expandable member can be completed. |
