发明名称 BRUSHLESS MOTOR AND POSITIONING TABLE EMPLOYING IT
摘要 PROBLEM TO BE SOLVED: To suppress lowering of torque as much as possible at the time of switching the phase by providing an auxiliary phase selection means for delivering a current error signal from the differential unit for each coil, as a current command, to other coil while switching selectively. SOLUTION: When a command is delivered from a servo controller 8 and a digital signal for making a switching from contact (c) to contact (a) is delivered from a phase switching controller 9 to the switch 13 for a coil 2, a stepwise command 2 is applied to the coil 2. But the output of a power operational amplifier 20 is saturated and the current 2 flowing into the coil 2 can not follow up the stepwise command. When an output current is subtracted from the current command value for the coil 2 and the difference is connected with (b) contact of the switch 13 for a coil 1, and a digital signal for making a switching from contact (a) to contact (b) of the switch 13 for coil 1 is delivered from a phase switching controller 9, a command 1 having smoothed step is delivered to the coil 1 and the motor current is prevented from lowering at the time of switching.
申请公布号 JPH09191680(A) 申请公布日期 1997.07.22
申请号 JP19960017095 申请日期 1996.01.05
申请人 CANON INC 发明人 MAKITA YOSHINORI
分类号 G03F9/00;H01L21/027;H01L21/68;H02P5/00;H02P25/06 主分类号 G03F9/00
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