| 摘要 |
PROBLEM TO BE SOLVED: To provide an image measuring machine for automatically measuring the total contour shape of an object to be inspected even if only a part of the object can be taken. SOLUTION: A measuring machine has a CCD camera 13 for capturing the image of an object to be inspected being on an XY stage and an image processing part 21 and at the same time has an XY stage drive part 10 for moving the stage, a stage position detection part 11 for detecting a stage coordinate value, an index traveling part 23 for moving an index on the screen of a monitor 4, and a contour shape measurement part 22 which moves an index to a point to be measured when the point where the index is to be moved is in a screen, and moves the stage so that the point to be measured is located at the center within the screen when the point is outside the image pick-up range. When the point deviates from the screen during measurement, the stage is moved so that the point comes to the center within the screen and then the index is moved to the point to be detected. |
