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发明名称
VACUUM PROCESSING DEVICE
摘要
申请公布号
JPH09189290(A)
申请公布日期
1997.07.22
申请号
JP19950354015
申请日期
1995.12.29
申请人
KOKUSAI ELECTRIC CO LTD
发明人
SUZAKI KENICHI
分类号
F04B49/10;B01J3/03;H01L21/205;(IPC1-7):F04B49/10
主分类号
F04B49/10
代理机构
代理人
主权项
地址
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