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发明名称
HANDOTAISOCHIOYOBISONOSEIZOHOHO
摘要
申请公布号
JP2630237(B2)
申请公布日期
1997.07.16
申请号
JP19930323513
申请日期
1993.12.22
申请人
NIPPON DENKI KK
发明人
SATO FUMIHIKO
分类号
H01L29/73;H01L21/20;H01L21/331;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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