| 摘要 |
A positive working light-sensitive composition which comprises: (a) 10 to 95% by weight of a compound which has at least one acid-decomposable group and whose solubility in an alkaline developer increases by the action of an acid, (b) 0.01 to 20% by weight of a disulfone compound represented by the formula (I): R1-SO2-SO2-R2 (I) wherein R1 and R2 may be same or different and represent substituted or unsubstituted alkyl groups, substituted or unsubstituted alkenyl groups or substituted or unsubstituted aryl groups, and (c) 3 to 85% by weight of a water-insoluble but alkaline water-soluble resin, wherein the optical density at 248 nm of 1 mu m thick coating of the composition is not more than 1.4 and the optical density at 248 nm of the coating exposed to light of 248 nm is less than the optical density of the coating before exposed to light. The light-sensitive composition is highly responsive to light of Deep-UV regions and excellent in image resolution. |
