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发明名称	DENSHIBIIMUROKOSOCHI
摘要
申请公布号	JP2629768(B2)	申请公布日期	1997.07.16
申请号	JP19880013425	申请日期	1988.01.22
申请人	FUJITSU KK	发明人	MYAGI SHINJI
分类号	H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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