发明名称 CLEANING METHOD OF TAPE SUPPORT FRAME
摘要 <p>PROBLEM TO BE SOLVED: To increase the number of repetitive use of a tape support frame by separating it from an UV tape and contacting a hot iron to protrudent deposits remaining on the surface of the frame to remove the residues, thereby enhancing the hard surface deposit removing ability. SOLUTION: In the case protrudent deposits 3 existing along e.g. a cutter trace 2 result when an adhesive agent remaining on the surface of a tape support frame 1 is hardened by the ultraviolet ray irradiation, the deposits 3 on the surface of the frame 1 are decomposed by heating to remove such that the top end of the heated iron of a hot knife 11 is contacted with the surface of the frame 1 during sliding it on a cutter trace 2, thereby heating the deposits 2 enough to remove. Thus, the surface deposit removing agility of the frame 1 is enhanced to increase the number of repetitive use of the frame 1.</p>
申请公布号 JPH09186114(A) 申请公布日期 1997.07.15
申请号 JP19960000725 申请日期 1996.01.08
申请人 FUJITSU LTD 发明人 YAMADA YUTAKA
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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