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发明名称
HEATER MECHANISM FOR APPARATUS FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH09183689(A)
申请公布日期
1997.07.15
申请号
JP19950351276
申请日期
1995.12.27
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
MITAMURA NOBUAKI;UESUGI TOSHIHARU;IWASAKI ATSUSHI;TAKEYASU YUKINOBU
分类号
C30B15/14;(IPC1-7):C30B15/14
主分类号
C30B15/14
代理机构
代理人
主权项
地址
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