| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device which enables relatively simple work of adjusting the smoothness of an upper surface of a substrate setting plate for setting a substrate on the upper surface thereof and holding the substrate at a horizontal attitude in a liquid coater, and which enables reduction of the time required for the adjustment. SOLUTION: Small through-holes 14 are formed to be scattered at a plurality of positions on a substrate susceptor 10, and a height adjustment mechanism 12 is provided at the position where each small through-hole 14 is formed. A height adjustment supporting screw 24 is engaged with a mounting screw 20 fixed on a base surface 18 in such a manner that the height adjustment supporting screw 24 supporting the susceptor 10 is movable in vertical directions. Thus, the height position of a supporting surface 26 may be adjusted by operation by an operating tool through the small through-hole 14 from the upper surface of the substrate susceptor 10.</p> |
