| 摘要 |
PURPOSE:To surely and stably perform the inspection of a substrate by extracting the feature quantity of component set in a packaging state from the images of plural reference substrates, and teaching a value in which a statistic processing is applied on the feature quantity as the feature quantity. CONSTITUTION:Each reference substrate 20 S is image-picked up, and after the feature quantity of the component 21 S in the packaging state is extracted from each image of the reference substrate 20 S, the statistic processing is applied on those feature quantities, and calculated values are taught as the feature quantities. Thus, since the feature quantity of the component 21 S in the packaging state is extracted from the images of the plural reference substrates 20 S and a statistically processed value is taught as the feature quantity to a substrate inspecting device, the feature quantity can be uniformed by the statistic processing even when dispersion exists in the packaging state of the component 21 S on an individual reference substrate 20 S, therefore, it is possible to reduce the missing of the finding out of a package defect or overobservation at the time of inspecting the packaging state of the component 21 S, and to surely and stably perform the inspection of the substrate. |
