发明名称 |
SINGLE CRYSTAL HOLDING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To surely hold a crystal to obviate the occurrence of crystal defects and to prevent the contamination of a raw material melt in an apparatus for pulling up the single crystal under pulling up by holding the engaging step part existing in a part of the single crystal. SOLUTION: This single crystal holding device is constituted to pull up the single crystal by holding the engaging step part existing in the lower part of a seed crystal by means of the holding parts of a pair of hanging jigs. The device is provided with a locking mechanism 37 consisting of a hook lever 40 and a detaining pin 41 in order to prevent the opening of the closed hanging jigs. The crystal holding part of the holding parts is provided with oscillating pawls freely oscillatable around horizontal pins. |
申请公布号 |
JPH09183694(A) |
申请公布日期 |
1997.07.15 |
申请号 |
JP19950351275 |
申请日期 |
1995.12.27 |
申请人 |
SHIN ETSU HANDOTAI CO LTD |
发明人 |
KIMURA MASAKI;IINO EIICHI;YAMAGISHI HIROTOSHI;TAKANO KIYOTAKA |
分类号 |
C30B15/32;C30B15/30;C30B29/06;H01L21/208;(IPC1-7):C30B15/32 |
主分类号 |
C30B15/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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