发明名称 |
System for inspecting pin grid arrays |
摘要 |
An arrangement for inspecting straightness of an array of pins in which the array is illuminated by a thin beam of light. Images of surfaces of the array of pins that are illuminated are projected on a photo-sensitive device. The array of pins is movable relative to the beam of light and the imaging device. The imaging device and photo-sensitive device are also movable relative to the array of pins.
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申请公布号 |
US5648853(A) |
申请公布日期 |
1997.07.15 |
申请号 |
US19950444258 |
申请日期 |
1995.05.18 |
申请人 |
ROBOTIC VISION SYSTEMS, INC. |
发明人 |
STERN, HOWARD;YONESCU, WILLIAM E. |
分类号 |
H01L21/66;(IPC1-7):G01B11/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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