发明名称 System for inspecting pin grid arrays
摘要 An arrangement for inspecting straightness of an array of pins in which the array is illuminated by a thin beam of light. Images of surfaces of the array of pins that are illuminated are projected on a photo-sensitive device. The array of pins is movable relative to the beam of light and the imaging device. The imaging device and photo-sensitive device are also movable relative to the array of pins.
申请公布号 US5648853(A) 申请公布日期 1997.07.15
申请号 US19950444258 申请日期 1995.05.18
申请人 ROBOTIC VISION SYSTEMS, INC. 发明人 STERN, HOWARD;YONESCU, WILLIAM E.
分类号 H01L21/66;(IPC1-7):G01B11/00 主分类号 H01L21/66
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