SINGLE CRYSTAL PULL-UP APPARATUS,申请号JP19950350722-传众专利搜索

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发明名称	SINGLE CRYSTAL PULL-UP APPARATUS
摘要
申请公布号	JPH09175883(A)	申请公布日期	1997.07.08
申请号	JP19950350722	申请日期	1995.12.26
申请人	SHIN ETSU HANDOTAI CO LTD	发明人	MIYAHARA YUICHI;MORI TAKASHI;TAMURA AKIHIKO;MIZUISHI KOJI;SOEDA SATOSHI
分类号	C30B15/00;C30B15/02;C30B29/06;H01L21/208;(IPC1-7):C30B15/02	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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