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发明名称
摘要
申请公布号
JP2626494(B2)
申请公布日期
1997.07.02
申请号
JP19930230630
申请日期
1993.09.17
申请人
发明人
分类号
H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/302
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代理人
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