| 摘要 |
PROBLEM TO BE SOLVED: To obtain a shape memory alloy element capable of continuously controlling the shape with temps. by continuously changing the compsn. of the alloy at prescribed ratios in the thickness direction from the surface. SOLUTION: This alloy is the one in which an Ni-Ti alloy is formed into a thin film shape, and the ratio of Ti is continuously changed from about 45 to 55% between the surface to the back. As for the method for forming the thin film, a shape memory alloy film of Ni and Ti is formed on a substrate by sputtering or the like, and, at this time, energy to be applied to the substrate of Ti is increased or reduced with time to change the ratio of Ti in the formed alloy thin film in the thickness direction. The alloy element produced in this way is wide in the range of the operating temp., and the displacement can be changed by the temp. control, so that it can be used for actuators and temp. sensors. |
