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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09172101(A)
申请公布日期
1997.06.30
申请号
JP19960326743
申请日期
1996.12.06
申请人
TOSHIBA CORP
发明人
NAKAGAWA AKIO;FURUKAWA KAZUYOSHI;OGURA TSUNEO;TANZAWA KATSUJIRO
分类号
H01L21/762;H01L21/76;H01L21/763;H01L21/8249;H01L27/06;(IPC1-7):H01L21/824
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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