发明名称 |
MEASUREMENT APPARATUS AND METHOD OF ENERGY GAP OF SEMICONDUCTOR |
摘要 |
The method and apparatus for displaying thermal characteristics of an energy gap by using an optic system and an image system consists of a cryostat(100) holding temperature of a semiconductor reagent low, a light projection unit(200) emitting light having a specified bandwidth on the semiconductor reagent in the cryostat(4) and an image processing unit(300) for processing an image and displaying a degree of its absorption and transparency.
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申请公布号 |
KR970010661(B1) |
申请公布日期 |
1997.06.30 |
申请号 |
KR19930026134 |
申请日期 |
1993.12.01 |
申请人 |
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KANG, SUNG-JOON |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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