发明名称 MEASUREMENT APPARATUS AND METHOD OF ENERGY GAP OF SEMICONDUCTOR
摘要 The method and apparatus for displaying thermal characteristics of an energy gap by using an optic system and an image system consists of a cryostat(100) holding temperature of a semiconductor reagent low, a light projection unit(200) emitting light having a specified bandwidth on the semiconductor reagent in the cryostat(4) and an image processing unit(300) for processing an image and displaying a degree of its absorption and transparency.
申请公布号 KR970010661(B1) 申请公布日期 1997.06.30
申请号 KR19930026134 申请日期 1993.12.01
申请人 KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 KANG, SUNG-JOON
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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