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发明名称
MULTILAYER COATING OF NITRIDE-CONTAINING COMPOUND AND METHODFOR FORMING THE SAME
摘要
申请公布号
JPH09169508(A)
申请公布日期
1997.06.30
申请号
JP19960156324
申请日期
1996.05.29
申请人
PRAXAIR S T TECHNOL INC
发明人
JIINJIEN ARUBAATO SUU
分类号
C01B21/076;C23C14/06;C23C28/04;(IPC1-7):C01B21/076
主分类号
C01B21/076
代理机构
代理人
主权项
地址
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