ULTRA-THIN IONISING RADIATION DETECTOR AND METHODS FOR MAKING SAME
摘要
An ultra-thin ionising radiation detector and methods for making same are disclosed. The detector comprises a stack of a substrate (200), an insulator film (202) and a surface silicon thin film (204) with a detector diode formed therein.
申请公布号
WO9723003(A1)
申请公布日期
1997.06.26
申请号
WO1996FR02019
申请日期
1996.12.18
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;FOULON, FRANCOIS;SPIRKOVITCH, SERGE;BABADJIAN, LIONEL
