发明名称 Thermostable coating materials
摘要 Novel intermediate compounds capable of being applied to a semiconductor precursor by spin-on methods which exhibit good planarity and gap-fill characteristics, the cured composites of which are capable of withstanding temperatures in excess of 500 DEG C. The disclosure further encompasses a process for fabricating semiconductor devices utilizing the intermediate compounds and its composite.
申请公布号 US5641838(A) 申请公布日期 1997.06.24
申请号 US19950486906 申请日期 1995.06.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 LINDE, HAROLD GEORGE;PREVITI-KELLY, ROSEMARY ANN;REEN, THOMAS JOSEPH
分类号 C08L83/06;C08G73/10;C08G77/54;C08L83/02;C09D183/14;H01L21/302;H01L21/3065;H01L21/312;(IPC1-7):C08G77/26 主分类号 C08L83/06
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