| 摘要 |
PROBLEM TO BE SOLVED: To attain a multi-LD type laser array where laser devices are driven with the same modulation signal to be connected in series so as to be enhanced in modulation efficiency. SOLUTION: An N-InP clad layer 6, an active layer 7, and a P-InP clad layer 8 are successively grown on a semi-insulating substrate 5, and the substrate 5 is etched as far as a halfway pant in the N-InP clad layer 6 for the formation of a stripe-like mesa structure, and a P-InP current block layer 9 and an N-InP current block layer 10 are formed on the etched part. A P<+> -InP cap layer 11 is formed thereon, and the surface of the N-InP clad layer 6 is exposed by selective etching, and an element isolation groove 12 is formed so as to reach to the semi-insulating substrate 5 penetrating through the N-InP clad layer 6. A P-side electrode 13 and an N-side electrode 14 are formed for each device, and the P-side electrode 13 and the N-side electrode 14 of the adjacent devices are connected together. |
