| 摘要 |
PROBLEM TO BE SOLVED: To achieve a device for improving an inspection efficiency by improving the reliability of the detection of a directional defect. SOLUTION: Laser beams 42 emitted by a laser light source 40 which is a line light source are applied to the surface of a substrate 33 via a collimator lens 43, a circular mask 44 where an annular slit 45 is provided, a half mirror 47, and a focusing lens 50, regular reflection light and scattered light 52 which reflection light from the surface of the substrate 33 pass through a focusing lens 50, a half mirror 47, a regular reflection light screening mask 53, and a light reception lens 54, and only the scattered light 52 is received by a light receiver 55. As a result, the peak of laser beams 51 in comical surface shape is located at each point on the surface of the substrate 33, a directional defect can also be easily detected since laser beams are applied from a direction of±180 deg., the reliability of defect inspection can be improved, and at the same time a line image-formation part can be simultaneously inspected for improving inspection efficiency since a laser light source is a light source and the line image is formed on the substrate surface.
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