| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a label for semiconductor wafer whereby the wafer is identifiable, without taking it out of a wafer cassette. SOLUTION: A label 15 for identifying a wafer 11 for use in production of a semiconductor device is composed of at least one recessed mark at an edge 13 of a flat zone A of the wafer 11. A lot number and wafer number composed of characters and figures indicated on the surface of a region adjacent to the mark are further indicated to more easily identify the wafer 11. Since the wafer need not be taken out from a wafer cassette to recognize the number of the wafer, the wafer is prevented from being scratched on the surface, thus reducing the damage and contamination of the wafer 11.</p> |
