发明名称 |
IC fault analysis system having charged particle beam tester |
摘要 |
An IC fault analysis system which is capable of accurately correlating mask layout data and/or net listing data associated with CAD (computer aided design) data developed in the IC design and an image obtained by a non-contact type tester such as an electron beam tester. The IC fault analysis system includes a circuit diagram display for showing a circuit diagram of the IC device under test based on the CAD data, a mask layout display for showing a mask layout of the IC device under test based on the CAD data, a contrast image display for showing a potential distribution of the IC device under test obtained in the non-contact type tester, an input means connected to the circuit diagram display for specifying a circuit component of the IC device under test, a comparison means for comparing the circuit diagram of the circuit component defined by the input means and contrast image corresponding to the circuit component, and a comparison data memory for storing the comparison data of the comparison means and providing the comparison data to the contrast image display. |
申请公布号 |
US5640098(A) |
申请公布日期 |
1997.06.17 |
申请号 |
US19960593549 |
申请日期 |
1996.01.30 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
NIIJIMA, HIRONOBU;KAWAMOTO, HIROSHI;GOISHI, AKIRA;KURIHARA, MASAYUKI;IWAI, TOSHIMICHI |
分类号 |
G01R31/307;G01R31/319;(IPC1-7):G01R31/305 |
主分类号 |
G01R31/307 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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