| 摘要 |
A mirror angle detector and a detection method capable of detecting an angle of deviation of a movable mirror within a very small angle range used ordinarily, and reducing the size of optical machining tool. A first mirror (9) for reflecting a main laser beam (95) is formed on, or fitted to, one of the surfaces of the movable mirror (82) and a second mirror (2) for reflecting position detecting light (10) and guiding it to a position sensor (3) is formed on, or fitted to, the other surface. An imaging lens (5) is disposed in an optical path for propagating reflected light of position detecting light by the movable mirror, and the position sensor (3) for receiving outgoing light from the imaging lens is disposed at a focal point of this imaging lens on the image side. An optical system (6, 7) constituting an afocal system or an optical system (11, 12, 13) for extending the optical path while repeating reflection may be disposed in the optical path between the movable mirror and the imaging lens.
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